ASTM F66-1984(1990) 微电子器件制造用光敏抗蚀剂的试验方法

上一篇: IEC 60487-2-6-1984 地面无线电中继系统所用设备的测量方法第2部分:分系统测量第6节:分集、双路和热备用设备
下一篇: ASTM F890-1984(1992) 微电子器件加工过程用的光刻膜中针孔密度的测定

标准名称：	夹布胶木滑轮技术条件
中标分类：
替代情况：	被HB 7598-1998替代
发布日期：	1977-04-23
实施日期：	1977-06-01
首发日期：
作废日期：	1998-07-01
出版日期：
页数：	12页

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【英文标准名称】:StandardPracticeforUseofaRadiochromicLiquidDosimetrySystem
【原文标准名称】:使用放射性铬液体剂量测定系统的标准实施规程
【标准号】:ASTMISO/ASTM51540-2004
【标准状态】:现行
【国别】:美国
【发布日期】:2004
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:E10.01
【标准类型】:(ISO/ASTM)
【标准水平】:()
【中文主题词】:
【英文主题词】:absorbeddose;dosimetry;electronbeams;gammaradiation;ionizingradiation;liquiddosimeter;qualitycontrol;radiationprocessing;radiochromicdosimetry;radiochromicliquid;radiochromicsolution;ICS
【摘要】:4.1Theradiochromicliquiddosimetrysystemprovidesameansofmeasuringabsorbeddoseinmaterials(5-7).Undertheinfluenceofionizingradiation,chemicalreactionstakeplaceintheradiochromicsolutionmodifyingtheamplitudesofopticalabsorptionbands(8-10).Absorbancevaluesaremeasuredattheselectedwavelength(s)withintheseaffectedabsorptionbands(seealsoISO/ASTMGuide51261).4.2Intheuseofaspecificdosimetrysystem,acalibrationcurveorresponsefunctionrelatesthedosimeter抯responsetoanabsorbeddosetraceabletoanationallyorinternationallyrecognizedstandard(11,12).4.3Theabsorbeddosethatismeasuredisusuallyspecifiedinwater.AbsorbeddoseinothermaterialsmaybeevaluatedbyapplyingtheconversionfactorsdiscussedinISO/ASTMGuide51261.NOTE2-Foracomprehensivediscussionofvariousdosimetrymethodsapplicabletotheradiationtypesandenergiesdiscussedinthispractice,seeICRUReports14,17,34,35,and37.4.4Thesedosimetrysystemsmaybeusedintheindustrialradiationprocessingofavarietyofproducts,forexamplethesterilizationofmedicaldevicesandradiationprocessingoffoods(5,7,13).4.5Theavailabledynamicrangeindicatedin1.2.1isachievedbyusingavarietyofradiochromicleucodyes(Table1)inavarietyofsolutions(Table2).4.6Theingredientsofthesolutions,inparticularthesolvents,canbevariedsoastosimulateanumberofmaterialsintermsofthephotonmassenergy-absorptioncoefficients,(礶n/r),forX-raysandgamma-raysandelectronmasscollisionstoppingpowers,[(1/r)dE/dx],overabroadspectralenergyrangefrom0.01to100MeV(18).Forspecialapplicationscertaintissue-equivalentradiochromicsolutionshavebeendesignedtosimulatevariousmaterialsandanatomicaltissues,intermsofvaluesof(礶n/r)forphotonsand[(1/r)dE/dx]forelectrons(18)(seealsoICRUReport44).Tabulationsofthevaluesof(礶n/r)forwater(19),theanatomicaltissues(17,19),andthreespeciallydesignedradiochromicsolutions,forphotonsovertheenergyrangefrom0.01to20MeV,andtabulationsofthevaluesof[(1/r)dE/dx](17)forwater,thetissuesandtheradiochromicsolutionsforelectronsovertheenergyrangefrom0.01to20MeVaregiveninRefs(12,13,18).ForadditionalinformationseeISO/ASTMGuide51261,ASTMPracticeE666,andICRUReports14,17,35,37,and44.1.1Thispracticecoverstheproceduresforpreparation,handling,testing,andusingradiochromicliquiddosimetrysystemsofradiochromicdyesolutionsheldinsealedorcappedcontainers(forexample,ampoules,vials).Italsocoverstheuseofspectrophotometricorphotometricreadoutequipmentformeasuringabsorbeddoseinmaterialsirradiatedbyphotonsandelectrons.1.2Thispracticeappliestoradiochromicliquiddosimetersolutionsthatcanbeusedwithinpartorallofthespecifiedrangesasfollows:1.2.1Theabsorbeddoserangeisfrom0.5to40000Gyforphotonsandelectrons.1.2.2Theabsorbeddoserateisfrom103to1011Gy/s.1.2.3Theradiationenergyrangeforphotonsisfrom0.01to20MeV.1.2.4Theradiationenergyrangeforelectronsisfrom0.01to20MeV.Note18212;Sinceelectronswithenergieslessthan0.01MeVmaynotpenetratethecontainerofthesolution,thesolutionsmaybestirredinanopenbeakerwiththeelectronsenteringthesolutionsdirectly(1).1.2.5Theirradiationtemperaturerangeisfrom-40to+60176;C.1.3Thisstandarddoesnotpurporttoaddressallofthesafetyconcerns,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:
【国际标准分类号】:
【页数】:6P.;A4
【正文语种】:英语